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High Pressure Oil-Free Helium Gas Compressor for Semiconductor Manufacturing

  • Power range: ≤55kW
  • Speed range: 400-600r/min
  • Flow range: ≤100Nm3/h
  • Intake pressure: ≤4 Bar
  • Exhaust pressure: ≤160Bar
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Product Definition

The Helium Gas Compressor is a high‑pressure, positive‑displacement compressor specifically engineered for handling helium gas. With a maximum discharge pressure of 160 Bar (16 MPa) and a flow capacity of up to 100 Nm³/h, it is designed for demanding industrial applications such as cylinder filling, gas recovery, and high‑pressure delivery. Its power consumption is ≤55kW, and it operates at a speed of 400‑600 r/min, ensuring efficient and reliable performance.

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Key Advantages

  • Ultra‑High Discharge Pressure – Delivers up to 160 Bar, suitable for high‑pressure cylinder filling, system pressurization, and other high‑head applications.

  • Stable Flow Capacity – Provides consistent flow up to 100 Nm³/h, meeting the needs of continuous or intermittent processes.

  • Energy Efficient – Low power consumption (≤55kW) reduces operating costs while maintaining high output.

  • Optimized Speed Range – Operates at 400‑600 r/min, balancing mechanical reliability and durability with lower wear.

  • Broad Inlet Pressure Adaptability – Handles intake pressures up to 4 Bar, making it compatible with various upstream gas sources.

  • Robust Construction – Built with durable materials and sealing systems to prevent helium leakage (critical for this scarce and expensive gas).

  • Oil‑Free Option Available – Can be configured with oil‑free components to meet high‑purity requirements (e.g., semiconductor, medical, or research applications).


Target Industries & Applications

    • Helium Filling & Recovery – Cylinder filling and gas recycling to reduce costs.

    • Aerospace & Defense – Spacecraft propulsion and ground support systems.

    • Scientific Research – Ultra‑low temperature cooling (superconductivity, quantum) and high‑pressure testing.

    • Semiconductor & High‑Precision Manufacturing – Cooling, protective atmosphere, carrier gas; oil‑free design required for purity (5N).

    • Medical Equipment – MRI magnet cooling, helium supply, and recovery.

    • Energy & Power – Nuclear reactor cooling, gas circulation, and natural gas/oil exploration.


FAQS

Q1: What is the maximum discharge pressure?

A: The compressor can achieve up to 160 Bar (16 MPa).


Q2: What is the rated flow rate?
A: The flow capacity is up to 100 Nm³/h under standard conditions.


Q3: What are the power and speed specifications?
A: The motor power is ≤55kW, and the operating speed ranges from 400 to 600 r/min.


Q4: What inlet pressure does it require?
A: The compressor is designed for an intake pressure of up to 4 Bar. Lower inlet pressures can be accommodated with optional boosters.


Q5: What are the typical applications?
A: Common uses include high‑pressure cylinder filling, helium recovery and recycling, semiconductor manufacturing (as coolant or carrier gas), MRI magnet cooling, aerospace ground support, and scientific cryogenic systems.


Q6: Is the compressor oil‑free?
A: It is available in both oil‑lubricated and oil‑free configurations. For applications requiring high purity (e.g., semiconductor, medical), we recommend the oil‑free version.


Q7: What maintenance is required?
A: Routine checks include valve and seal inspection, filter replacement, and periodic lubrication (if oil‑lubricated). The oil‑free version eliminates oil‑change procedures.


Q8: Can it operate continuously?
A: Yes, the compressor is designed for continuous duty, with proper cooling and maintenance.

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