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A screw vacuum pump is a dry vacuum device that uses two precisely meshing, non-contact helical rotors (screws) to rotate synchronously in opposite directions within the pump chamber. By continuously forming a sealed cavity, it draws in gas from the inlet, compresses it, and pushes it to the outlet for discharge.
Technical parameter
| Model | Power (kW) | Max. Vacuum | Max.Capacity (m³/min) | Inlet Connection (mm) | Outlet Connection (mm) | Weight (kg) | Dimension (mm) |
| mbar | |||||||
| RV25APM | 18.5 | 0.7 | 17.5 | DN125 | DN100 | 1500 | 1600*1300*1700 |
| RKV30APM | 22 | 23.3 | DN125 | DN100 | 1550 | 1600*1300*1700 | |
| RKV40APM | 30 | 27.0 | DN125 | DN100 | 1650 | 1600*1560*1700 | |
| RKV50APM | 37 | 30.0 | DN125 | DN100 | 1700 | 1600*1560*1700 |
Features and Advantages
1. Clean and Oil-Free
A core advantage. Minimal clearance between rotors and between the rotor and the pump chamber eliminates friction and the need for oil seals and lubrication, providing a clean vacuum environment and preventing oil vapor contamination of process materials.
2. Stable Pumping Speed and High Vacuum
Maintains a stable pumping speed over a wide pressure range (from atmospheric pressure to high vacuum). A single-stage pump can achieve high ultimate vacuums (typically < 1 Pa or even 0.1 Pa).
3. Corrosion Resistance and Effective Handling of Condensable Gases
Corrosive process gases can be handled by selecting special coatings (such as nickel-phosphorus plating or Teflon) or corrosion-resistant materials. It exhibits good resistance to condensable vapors (such as water vapor and solvent vapors), is less prone to liquid slugging, and is an ideal replacement for steam jet pumps.
4. Low Maintenance Costs and Long Service Life
Dry operation eliminates the need for expensive vacuum oil, oil filters, and waste oil disposal costs. Compact design and long maintenance intervals.
Application industries
Screw vacuum pumps, due to their cleanliness, high efficiency, and reliability, have become the preferred choice for many high-tech and demanding processes. They are primarily used in:
• Semiconductor and electronics industry: Key processes such as etching, CVD, PVD, and ion implantation in chip manufacturing, LED, and solar cell production.
• Pharmaceutical and chemical industry: Vacuum drying, distillation, concentration, solvent recovery, and chemical material transportation of pharmaceuticals.
• Food industry: Vacuum packaging, freeze-drying, and dehydration.
• Scientific research and laboratories: Synchrotron radiation, electron microscopy, accelerators, and other experimental equipment requiring a clean vacuum environment.
• Industrial applications: Vacuum metallurgy, heat treatment, brazing, etc.
A screw vacuum pump is a dry vacuum device that uses two precisely meshing, non-contact helical rotors (screws) to rotate synchronously in opposite directions within the pump chamber. By continuously forming a sealed cavity, it draws in gas from the inlet, compresses it, and pushes it to the outlet for discharge.
Technical parameter
| Model | Power (kW) | Max. Vacuum | Max.Capacity (m³/min) | Inlet Connection (mm) | Outlet Connection (mm) | Weight (kg) | Dimension (mm) |
| mbar | |||||||
| RV25APM | 18.5 | 0.7 | 17.5 | DN125 | DN100 | 1500 | 1600*1300*1700 |
| RKV30APM | 22 | 23.3 | DN125 | DN100 | 1550 | 1600*1300*1700 | |
| RKV40APM | 30 | 27.0 | DN125 | DN100 | 1650 | 1600*1560*1700 | |
| RKV50APM | 37 | 30.0 | DN125 | DN100 | 1700 | 1600*1560*1700 |
Features and Advantages
1. Clean and Oil-Free
A core advantage. Minimal clearance between rotors and between the rotor and the pump chamber eliminates friction and the need for oil seals and lubrication, providing a clean vacuum environment and preventing oil vapor contamination of process materials.
2. Stable Pumping Speed and High Vacuum
Maintains a stable pumping speed over a wide pressure range (from atmospheric pressure to high vacuum). A single-stage pump can achieve high ultimate vacuums (typically < 1 Pa or even 0.1 Pa).
3. Corrosion Resistance and Effective Handling of Condensable Gases
Corrosive process gases can be handled by selecting special coatings (such as nickel-phosphorus plating or Teflon) or corrosion-resistant materials. It exhibits good resistance to condensable vapors (such as water vapor and solvent vapors), is less prone to liquid slugging, and is an ideal replacement for steam jet pumps.
4. Low Maintenance Costs and Long Service Life
Dry operation eliminates the need for expensive vacuum oil, oil filters, and waste oil disposal costs. Compact design and long maintenance intervals.
Application industries
Screw vacuum pumps, due to their cleanliness, high efficiency, and reliability, have become the preferred choice for many high-tech and demanding processes. They are primarily used in:
• Semiconductor and electronics industry: Key processes such as etching, CVD, PVD, and ion implantation in chip manufacturing, LED, and solar cell production.
• Pharmaceutical and chemical industry: Vacuum drying, distillation, concentration, solvent recovery, and chemical material transportation of pharmaceuticals.
• Food industry: Vacuum packaging, freeze-drying, and dehydration.
• Scientific research and laboratories: Synchrotron radiation, electron microscopy, accelerators, and other experimental equipment requiring a clean vacuum environment.
• Industrial applications: Vacuum metallurgy, heat treatment, brazing, etc.
